Characterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror
University of Victoria, Department of Mechanical Engineering, PO Box 3055, Stn. CSC, Victoria, BC, V8W 3P6, Canada
2 Subaru Telescope NAOJ, 650 N. A’Ohoku Place, 96720 Hilo, HI, USA
3 University of Montana, Department of Mathematical Sciences, Bozeman, MT 59717-2400, USA
a e-mail: email@example.com
In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane deflection. The actuator’s stroke-voltage relationship and the effect of the nonadditivity of the influence functions are studied and finally integrated in an open-loop control process. This experiment aimed at minimizing the residual error obtained in open-loop control.
© Owned by the authors, published by EDP Sciences, 2010